Double High Vacuum PECVD and Magnetron Sputtering (ISUPAM)

   It can be used to prepare various single-layer or multi-layer semiconductorhreaction films, insulating films, magnetic recording films, optical recording films, transparent conductive films, high-temperature superconducting films, etc.Ithcan be coated on the surface of the shaped body. It is suitable for the teaching research of 

scientific research institutes and the production of coatings for small and medium-sized enterprises.

(ISUPAM, Institute of Super-microstructure and Ultrafast Process in Advanced Materials)