Chemical Vapor Deposition(CVD)

  The tubular furnace mainly realizes the experimental methods such as CVD, PVD and annealing through automatic temperature control of the program, and can realize rapid cooling by the slide rail. Double temperature zone rail furnace specifications:

   Configuration: one set of double temperature zone slide tube furnace(with three flow control system, one set of nitrogen 500sccm, argon gas 500sccm, hydrogen 50sccm), one set of KF25 suction port vacuum pump, flange modification(all ends are modified, each end The three air outlets include the KF25 suction port, 1/4, the interface air outlet, and the vacuum pressure gauge air outlet and the pagoda pumping interface.

1.Shell structure: double-shell structure with air-cooling system, the temperature of the shell surface is less than 60 degrees; the furnace insulation material uses high-purity alumina polycrystalline fiber to reduce heat loss; The US imported 1750 degree high temperature aluminum oxide coating can improve the reflectivity and heating efficiency of the equipment, and also extend the service life of the instrument.

2.Power: 2.5KW

3.Voltage: AC 220V 50Hz/60Hz

4.Working temperature: up to 1200°C (<1h), continuous operation 1100°C

5.The maximum temperature rise and fall rate: 20°C/min

6.Temperature control accuracy: ± 1°C

7.Vacuum: 10-2torr (mechanical pump), 10-5 torr (molecular pump)

8.Air leakage rate:<5mtorr/min

9.Heating rate: ≤ 10°C/min

10.Furnace tube size and flange: high purity quartz tube with purity of 99.8%; including stainless steel vacuum sealing flange, needle valve, and pressure gauge

11.Expansion interface: standard KF25 adapter adapter; standard VCR double ferrule connector, the end of the furnace is equipped with flange bracket bracket length according to the size of the tube tube!(non-standard customization)

12.temperature control system: PID intelligent temperature controller, can set 30-segment temperature rise and fall program; each temperature zone can be set independently, with overheating and break protection

13.control method: PID automatic control