Equipment

Double High Vacuum PECVD and Magnetron Sputtering (ISUPAM)

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Time-of-Flight Electronic Spectrometer(ISUPAM)

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Two-Photon Photoelectron Spectroscopy Analyzer(ISUPAM)

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Atomic Force Microscope(AFM,ISUPAM)

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Multifunctional Vacuum Coating Instrument(ISUPAM)

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