URE-2000/35 UV lithography machine
2019-05-12 10:27:51
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URE-2000/35 UV lithography machine is a precision equipment for collecting micro-machining, light and machine. It consists of an exposure optical system, an alignment microscope, a workpiece stage, an electronic control system, a single chip system, and a video image system.
(1) The mercury lamp power supply adopts a 350W DC high pressure mercury lamp with an exposure wavelength of 365 nm;
(2) Alignment adopts binocular dual field of view alignment microscope. In the eyepiece, both images of one field of view can be observed separately, and images of two fields of view can be observed simultaneously. The maximum magnification of eyepiece objective combination is 400 times;
(3) Lithography precision <1 μm.
